N. N. Gerasimenko, A. A. Chamov, N. A. Medetov, V. A. Khanin, “Specific features of relief formation on silicon etched by a focused ion beam”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2010, Volume 36, Issue 21,Pages <nobr>38

This article is cited in 2 papers

Specific features of relief formation on silicon etched by a focused ion beam

N. N. Gerasimenko^ab, A. A. Chamov^ab, N. A. Medetov^ab, V. A. Khanin^ab

^a National Research University of Electronic Technology
^b Molecular Electronics Research Institute

Abstract: The effect of a focused ion beam on the state of a silicon crystal surface has been studied. Periodic ring-shaped ribs have been observed on the walls of an etched cylindrical hole. The formation of periodic structures depends on the conditions of ion beam etching. The observed phenomenon is explained based on the notion of the radiation-induced plasticity.