This article is cited in 4 papers

New approach to metrology in nanotechnology

S. K. Maksimov^ab, K. S. Maksimov<sup>ab

a</sup> Moscow Institute of Electronic Technology (Technical University), Zelenograd, Moscow, 124498, Russia
^b Analytics & Worldwide Technologies Company, Moscow, 127566, Russia

Abstract: Notions of a fractional method of control in nanotechnology are presented and a key stage of the method is described that is related to determining the shape and dimensions of nanoobjects based on their scanning electron microscopy images obtained at various convergence angles of the electron probe.

Received: 19.05.2010

 English version: Technical Physics Letters, 2010, 36:10, 938–941

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