This article is cited in 12 papers

Formation and use of positioning marks in scanning probe microscopy

V. N. Lozovskii, S. N. Chebotarev, V. A. Irkha, G. V. Valov

South-Russia State University (Novocherkassk Polytechnic Institute), Rostov oblast, Novocherkassk, 346428, Russia

Abstract: We describe a new method for the formation of special positioning marks on the surface of one- and two-dimensional objects, which makes it possible to fix local regions of investigation in scanning probe microscopy. The efficiency of using the proposed marks in practical investigations on a nanoscale level is demonstrated.

Received: 19.03.2010

 English version: Technical Physics Letters, 2010, 36:8, 737–738

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