Abstract:
Online in situ monitoring of the gas-discharge deposition of lead zirconate titanate Pb(Zr$_x$Ti$_{1-x}$)O$_3$ (PZT) films onto a stainless steel substrate revealed oscillatory decay in the intensity of light with a wavelength of 0.640 $\mu$m specular reflected from the growing film. It is established that the parameters of the reflectance curves depend on the electric power deposited in discharge and correlate with the type of growing films (possessing pyrochlore or perovskite structures). Using the proposed method, it is possible to control technological parameters of the deposition process, which determine the physical characteristics of the obtained PZT films.
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