This article is cited in 4 papers

Features of the spectra of optical emission from high-frequency discharge plasma during bismuth ferrite sputtering

P. S. Plyaka^ab, G. N. Tolmachev<sup>ab

a</sup> Southern Research Center of the Russian Academy of Sciences, Rostov-on-Don
^b Research Institute of Physics, Southern Federal University, Rostov-on-Don, Russia

Abstract: The spectra of optical emission from plasma of the RF discharge in oxygen during the sputtering of bismuth ferrite (BiFeO$_3$) and iron-containing alloy targets have been studied. Two anomalously intense lines of emission from iron atoms at 613.6 and 306.7 nm have been observed during the sputtering of bismuth ferrite, which are much less pronounced in the case of metal targets. The lines of emission from bismuth atoms are completely absent. A mechanism responsible for excitation of the anomalous emission lines during the sputtering of BiFeO$_3$ is proposed.

Received: 22.09.2009

 English version: Technical Physics Letters, 2010, 36:2, 192–194

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