This article is cited in 5 papers

X-ray scattering on multilayer porous structures

V. I. Punegov^a, A. A. Lomov<sup>b

a</sup> Komi Scientific Center of Ural Branch of RAS, Syktyvkar
^b Institute of Cristallography Russian Academy of Sciences, Moscow

Abstract: A model for description of the coherent and diffuse X-ray scattering from multilayer porous crystals has been developed based on a statistical dynamical theory of diffraction. Reciprocal space maps of the intensity of scattering from these structures are numerically simulated. It is shown that a significant role in the formation of equal-intensity contours is played by the statistical averaging with respect to pore sizes. Average parameters of InP porous structures, including the average pore sizes and lateral quasi-period, have been determined using a comparative analysis of the experimental data and results of numerical simulations.

Received: 13.07.2009

 English version: Technical Physics Letters, 2010, 36:2, 122–125

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