V. S. Kovivchak, T. V. Panova, O. V. Krivozubov, N. A. Davletkildeev, “Formation of surface structures on single-crystalline silicon under the action of nanosecond high-power ion beam pulses”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2011, Volume 37, Issue 24,Pages <nobr>88

This article is cited in 3 papers

Formation of surface structures on single-crystalline silicon under the action of nanosecond high-power ion beam pulses

V. S. Kovivchak^ab, T. V. Panova^ab, O. V. Krivozubov^ab, N. A. Davletkildeev^ab

^a Omsk Branch, Institute for Semiconductor Physics, Siberian Branch, RAS
^b Omsk State University

Abstract: We have studied the formation of surface structures on single-crystalline silicon surface under the action of a nanosecond pulsed high-power proton-carbon ion beam. Morphological features of the structures that appear as a result of this processing are described and possible mechanisms of their formation are considered.

Received: 19.07.2011