Abstract:
We report a method for synthesizing tellurium (Te) whiskers, both solid and hollow, with reproducible morphology and geometry. The approach, based on tellurium evaporation in a hydrogen atmosphere, enables precise control over whisker characteristics through adjustment of key process parameters: crucible temperature, substrate temperature, their temperature gradient, and hydrogen pressure. Direct integration of an individual Te whisker into a micro-sensor structure is demonstrated, followed by a rapid evaluation of NO$_2$ sensing performance for whiskers of two diameters (28 and 60 $\mu$m) at room temperature. At a concentration of 5 ppm, the sensor achieves a sensitivity of $S\approx$ 10%, while the minimum detected concentration is 0.3 ppm for the 28 $\mu$m whisker. The device exhibits a reproducible and reversible response, highlighting its potential for application in miniature, low-power gas analyzers.