Abstract:
The laws of corrugation (wrinkling) that takes place in thin aluminum films on silicon substrates with styrene sublayers under the conditions of thermal treatment have been studied using atomic force microscopy techniques. Measurements of the amplitude and period (wavelength) of wrinkles revealed stages in the viscoelastic corrugation process at various temperatures. It is established that the evolution of wrinkles in the course of annealing is controlled by the periodic distribution of normal and tangential stresses at the film-sublayer interface.