Abstract:
The spectral characteristics of emission from plasma of periodic-pulsed capacitive discharge in a mixture of water vapor with helium have been studied in a spectral range of 140–315 nm. Dependences of the intensity of the characteristic emission lines of hydroxy groups in He–H$_2$O plasma on the partial pressure of water vapor at a helium pressure of $p$(He) = 2.6 kPa are presented. The results provide a basis for the creation of simple sources of vacuum-UV radiation with a cheap working medium based on water vapor.