Abstract:
Silicon photodiodes have been tested for resistance to vacuum-ultraviolet radiation at 121.6 nm. The responsivities of the $p$–$n$ and $n$–$p$ photodiodes under study were found to degrade by tens of percent at a VUV radiation dose on the order of tens of mJ/cm$^2$. The effect of reversible photocurrent relaxation has been observed in detectors based on $n$–$p$ structures.