This article is cited in 9 papers

Crystallization and thermochromism in tungsten oxide films annealed in vacuum

V. I. Shapovalov^ab, A. E. Lapshin^ab, A. E. Komlev^ab, A. A. Komlev<sup>ab

a</sup> Saint Petersburg Electrotechnical University "LETI"
^b I. V. Grebenshchikov Institute of Silicate Chemistry of the Russian Academy of Sciences, St. Petersburg

Abstract: The crystalline phases formed in tungsten oxide (WO$_{3-x}$) films upon isothermal step annealing in vacuum and air at various temperatures within 500–750$^\circ$C have been studied. The films were deposited onto silica glass substrates by reactive dc magnetron sputtering. It is established that the observed thermochromism is related to the presence of an oxygen-deficient WO$_{3-x}$ phase belonging to the hexagonal system, which is intensely formed as the annealing temperature increases from 650 to 750$^\circ$C.

Received: 20.02.2012

 English version: Technical Physics Letters, 2012, 38:6, 555–558

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