Abstract:
Mathematical modeling of processes in a RF inductively coupled plasma torch is described. The obtained temperature and plasma velocity distributions were used as initial data for calculating the motion of erbium oxide powder in a plasma jet. As a result, the technological process parameters were obtained that ensure effective processing. The obtained operating parameters were used for experimental studies. The obtained erbium oxide microspheres turned out to be an order of magnitude larger than the initial powder. The article presents hypotheses explaining this result. Optical studies of the obtained microspheres showed intense photoluminescence in the visible and near infrared spectral range.