Abstract:
High-aspect-ratio structures with thin corrugated walls have been obtained by processing of macroporous silicon with a trigonal lattice in anisotropic etchants. For this purpose, a pattern of seeding etch pits with a certain orientation relative to crystallographic axes is created prior to electrochemical etching and a solution of definite composition for treating macropores is used after anodizing. The possibility of using zigzag structures as anodes in lithium-ion batteries is discussed.
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