This article is cited in 5 papers

The formation of the (200) and (110) textures in iron films prepared by magnetron sputtering

A. S. Dzhumaliev, Yu. V. Nikulin, Yu. A. Filimonov

Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences

Abstract: The effect of working-gas pressure on the texture of iron films on Si(100)/SiO$_2$ substrates prepared by magnetron sputtering at room temperature is studied. It is shown that a change in working-gas pressure from 1.33 to 0.09 Pa leads to a change in the texture of the films from (110) to (200), which is accompanied by transition from a columnar to quasi-homogeneous microstructure of the films. It is found that the surface roughness of the film nonmonotonically depends on working-gas pressure and has a maximum in a pressure range corresponding to the coexistence of phases with the (110) and (200) textures in the film.

Received: 23.04.2013

 English version: Technical Physics Letters, 2013, 39:11, 938–941

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