This article is cited in 10 papers

Special aspects of structure formation of a multicomponent layer in vacuum-arc plasma

Yu. A. Bystrov^abc, N. Z. Vetrov^abc, A. A. Lisenkov<sup>abc

a</sup> Saint Petersburg Electrotechnical University "LETI"
^b SED-SPb Company, St. Petersburg
^c Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, St. Petersburg

Abstract: A phase boundary is an energy barrier to diffusing atoms. To decrease the diffusion rate, densely packed multicomponent structures were used. The correlation between the methods of obtaining and properties of multicomponent coating formed in a single fabrication cycle upon step-by-step synthesis of carbide of a substrate material and sputter deposition of layers of zirconium and zirconium carbide was investigated.

Received: 17.06.2013

 English version: Technical Physics Letters, 2013, 39:10, 914–916

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