Abstract:
The dependences of the average height on the scan area width and surface profile structure in atomic force microscopy are analyzed. It is shown by the example of the average height that, in the analysis of the atomic force microscopy data, it is necessary to determine local and global statistical parameters. The local statistical parameters can be larger than the global ones. For the given example, the scaling function is determined, which makes it possible to relate several experimental parameters for predicting the average height.