Abstract:
The growth of nanostructured films obtained by magnetron sputtering on glass substrates with and without pre-deposited dense ITO layers has been studied. It has been shown that the intermediate ITO layer helps the nucleation of nanowires at low temperatures at the initial stages of film growth. the optical measurements have demonstrated the antireflection ability of a nanocrystal layer. Taking into account the reduced surface resistance of the obtained films, the suggested method is promising for a wide range of applications including the manufacture of transparent electrodes for optoelectronic devices.
Keywords:transparent conductive oxides, indium tin oxide, ITO, nanostructured coatings.
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