This article is cited in 4 papers

Neutral gas rotation in magnetron discharge

A. F. Pal'^ab, A. N. Ryabinkin^ab, A. O. Serov^ab, A. V. Filippov<sup>b

a</sup> Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
^b Troitsk Institute for Innovation and Fusion Research

Abstract: We have experimentally established the existence and determined the velocity of motion of the neutral component of plasma in a planar magnetron discharge, which takes place in the direction of drift of the charged plasma component in crossed electric and magnetic $(\mathbf{E}\times\mathbf{B})$ fields. For this purpose, we have studied the propagation of a small gaseous additive over the plasma ring of dc magnetron discharge in the diffusion regime. The obtained temporal dependences of the intensity of atomic emission spectra of the additive in various regions of the plasma ring are compared to the results of numerical solution of the diffusion equation for the experimental conditions studied.

Received: 08.08.2014

 English version: Technical Physics Letters, 2014, 40:12, 1142–1145

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