This article is cited in 2 papers

Experimental study of accelerated argon ion-cluster beams

N. G. Korobeishchikov^ab, V. V. Kalyada^ab, A. A. Shmakov^ab, G. I. Shul’zhenko<sup>ab

a</sup> G I. Budker Institute of Nuclear Physics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk
^b Novosibirsk State University

Abstract: The formation of accelerated vapor-phase argon beams has been analyzed experimentally with the aim of developing a laboratory bench for ion-cluster modification of materials. Accelerated argon-cluster beams with energies up to 22 keV and intensities up to 6 $\times$ 10$^{13}$ ions/(cm$^2$ s) have been produced at an average size of cluster ions up to 10$^{13}$ atoms/cluster. The size distributions of ions in an accelerated ion-cluster beam have been investigated by the retarding-potential method at different stagnation pressures. It is shown that the mass composition of an ion-cluster beam depends on the conditions of ion-beam formation.

Received: 08.08.2013

 English version: Technical Physics Letters, 2014, 40:1, 25–28

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