Abstract:
It has been found out that a pulsed low-pressure high-frequency inductive (HF) discharge in a large volume in an external magnetic field has a non-uniform (filamented) structure. At magnetic fields of several hundred gauss, the developing discharge irregularities, the transverse scale of which is about 10 cm, are not smoothed out by diffusion and are preserved at the plasma decay stage. Such instability should be considered when designing large-scale pulsed devices with an RF discharge for various applications.