A. A. Pavlov, D. G. Gromov, S. N. Skorik, A. Yu. Trifonov, A. S. Shulyat’ev, “CVD growth of carbon nanotubes on thin-film Ni$_{20}$Ti$_{35}$N$_{45}$ alloy catalyst”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 41, Issue 24,Pages 37

This article is cited in 3 papers

CVD growth of carbon nanotubes on thin-film Ni$_{20}$Ti$_{35}$N$_{45}$ alloy catalyst

A. A. Pavlov^a, D. G. Gromov^b, S. N. Skorik^c, A. Yu. Trifonov^d, A. S. Shulyat’ev^b

^a Institute of Nanotechnologies of Microelectronics, Russian Academy of Sciences
^b National Research University of Electronic Technology
^c SPC "Technological Center" MIET
^d State Research Institute of Physical Problems

Abstract: The possibility of forming carbon nanotube (CNT) arrays on a Ni–Ti–N catalytic alloy with low nickel content by chemical vapor deposition (CVD) is demonstrated. Adding nitrogen to the Ni–Ti alloy composition favors the formation of TiN compound and segregation of Ni on the surface, where it produces a catalytic effect on the CNT growth. It is found that, using CVD from acetylene gas phase at a substrate temperature of 650$^\circ$C, a CNT array of 9-$\mu$m height can be grown for 2 min.

Received: 08.07.2015