This article is cited in 2 papers

Neutral cluster size and fragmentation during ion sputtering of solids

V. I. Matveev, D. N. Makarov, S. N. Kapustin

Northern (Arctic) Federal University named after M. V. Lomonosov, Arkhangelsk

Abstract: A theory of the ion sputtering of solids in the form of excited atomic clusters with their subsequent fragmentation has been developed. The theory is based on simple physical assumptions and agrees with experiment. The results are presented in the form of expressions convenient for practical application, which is demonstrated by calculation of the total yields of silver and indium clusters.

Received: 18.03.2015

 English version: Technical Physics Letters, 2015, 41:8, 771–773

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