E. A. Kirillov, P. V. Minakov, D. V. Lopaev, A. T. Rakhimov, “Hot carbon nanoparticles in plasma volume during the plasma-assisted chemical vapor deposition of diamond films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2025, Volume 51, Issue 9,Pages <nobr>35

Hot carbon nanoparticles in plasma volume during the plasma-assisted chemical vapor deposition of diamond films

E. A. Kirillov^ab, P. V. Minakov^a, D. V. Lopaev^a, A. T. Rakhimov^ab

^a Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
^b Lomonosov Moscow State University

Abstract: In the present paper, it is shown that the appearance of continuous Planck radiation in the emission spectrum of microwave plasma, during the plasma-assisted chemical vapor deposition of diamond films, may be associated with the formation of carbon nanoparticles in it's volume. According to the spectrum recorded in the near infrared wavelength range, the temperature of these particles was determined to be $\sim$ 2600 $\pm$ 100 K. The obtained result indicates the possibility of the existence of carbon nanoparticles in the plasma's hot area.

Keywords: CVD diamond, plasma-assisted chemical vapor deposition, carbon nanoparticles, plasma spectroscopy.

Received: 16.12.2024
Revised: 20.12.2024
Accepted: 16.01.2025

DOI: 10.61011/PJTF.2025.09.60230.20225