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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2022 Volume 48, Issue 19, Pages 31–34 (Mi pjtf7413)

A new method for synchrotron radiation X-ray imaging of micro-objects using nanofocusing optics and tomography

V. G. Kohna, T. S. Argunovab

a National Research Centre "Kurchatov Institute", Moscow, Russia
b Ioffe Institute, St. Petersburg, Russia

Abstract: A new absorption-based method for studying the internal structure of micro-objects using synchrotron radiation is proposed. The method registers the integral intensity of the beam after passing through the object, and the locality is achieved by focusing the beam with a refractive lens into a nanometer-wide line. In this case, phase contrast is not utilized, the result is obtained immediately, and two-dimensional images of an object are calculated by computed tomography. The method does not require complex mathematical calculations and gives high accuracy results. Model experiments using a silicon carbide substrate and some other parameters were performed for illustrative purposes.

Keywords: synchrotron radiation, micro-objects, nanofocusing, tomography, micropores.

Received: 03.08.2022
Revised: 19.08.2022
Accepted: 22.08.2022

DOI: 10.21883/PJTF.2022.19.53593.19333



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