Deposition of the amorphous metal coating onto hollow glass microspheres

A. F. Pal', A. N. Ryabinkin, A. O. Serov

Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Moscow, Russia

Abstract: Amorphous metal Pt–Zr coatings micron in thickness, as well as crystalline ones, were obtained on the surfaces of hollow thin-wall glass microspheres using direct current magnetron sputtering at the deposition rate of 0.1 nm/s. Being in the range of 1–1.5 nm, the roughness of the obtained amorphous coatings is essentially lower than that of crystalline coatings of the same composition.

Keywords: metal glasses, amorphous metal films, platinum, zirconium, magnetron sputtering, glass microspheres, inertial confinement fusion targets.

Received: 29.12.2021
Revised: 29.12.2021
Accepted: 11.01.2022

DOI: 10.21883/PJTF.2022.06.52212.19120

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