Abstract:
For the first time, an approach to modifying mechanical properties through thermal recrystallization processes of thin-film aluminum structures made in the form of a square, pentagonal and round membrane obtained by magnetron deposition had been implemented and explained. The experiment was carried out using planar silicon technology. A change in mechanical properties was revealed after heat treatment at 450$^\circ$C for 1 hour in a vacuum atmosphere (for example, critical rupture pressure of a round membrane decreased from 4.9 to 4.0 atm, average change of critical rupture pressure decreased from $\pm$ 1.5 to $\pm$ 0.9 atm, biaxial modulus of elasticity decreased by 24 GPa) due to a change in the structural properties of the material (grain size increased almost 2 times, roughness increased from 76 $\pm$ 4 to 4480 $\pm$ 90 nm). Additional heat treatment allowed to create more reliable Al membranes.
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