Determination of the stoichiometry of AlN coatings by radioactivation with bunches of collectively accelerated deuterons

V. A. Ryzhkov, M. V. Zhuravlev

Tomsk Polytechnic University, Tomsk, Russia

Abstract: The use of deuteron bunches collectively accelerated in a Luce diode to an average energy of 1200 $\pm$ 200 keV and a number of 10$^{13}$ per shot is shown for the radioactive determination of the stoichiometry of AlN coatings with a known thickness. In each shot, the deuteron energy was determined by measuring the drift velocity of the virtual cathode collectively accelerating deuteron bunches, and the coating stoichiometry was determined with an accuracy of no worse than $\pm$ 5% from the ratio of the activities of the $^{28}$Al/$^{15}$O radionuclides induced in the nuclear reactions $^{27}$Al$(d,p)$ $^{28}$Al and $^{14}$N$(d,n)$ $^{15}$O, respectively.

Keywords: collective ion acceleration, virtual cathode, radioactivation analysis, stoichiometry, coating.

Received: 30.01.2023
Revised: 15.05.2023
Accepted: 16.05.2023

DOI: 10.21883/PJTF.2023.13.55736.19515

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