This article is cited in 4 papers

Preferential sputtering of NiTi alloy by atomic and gas cluster ions

A. E. Ieshkin^a, V. S. Chernysh^a, D. S. Kireev^a, B. R. Senatulin^b, E. A. Skryleva<sup>b

a</sup> Lomonosov Moscow State University, Moscow, Russia
^b National University of Science and Technology «MISIS», Moscow, Russia

Abstract: X-ray photoelectron spectroscopy was used to study the evolution of the NiTi alloy surface composition under bombardment with atomic and cluster argon ions. A strong enrichment of the surface with nickel was found for both atomic and cluster ions, which is inconsistent with contemporary understanding of preferential sputtering. Possible reasons for this result are discussed.

Keywords: ion sputtering, cluster ions, preferential sputtering, XPS.

Received: 01.12.2022
Revised: 11.01.2023
Accepted: 17.04.2023

DOI: 10.21883/PJTF.2023.11.55536.19447

Bibliographic databases:

•