Low-emission carbon coatings for control grids of high power vacuum devices

R. K. Yafarov, N. O. Shabunin

Saratov Branch, Kotel'nikov Institute of Radio-Engineering and Electronics, Russian Academy of Sciences, Saratov, Russia

Abstract: The influence of the dipole polarization of carbon film coatings on their secondary electron emission has been studied. It is shown that plasma fluorination of carbon coatings with low specific surface resistance obtained in microwave plasma of low-pressure ethanol vapor increases the electron work function by 0.6 eV and reduces the secondary electron emission by more than a factor of two. The results can be used to obtain collectors and anti-emission coatings on grid electrodes of high-power electrovacuum devices in the microwave and sub-terahertz ranges.

Keywords: microwave plasma, carbon film, plasma fluorination, work function, secondary electron emission.

Received: 21.04.2022
Revised: 27.12.2022
Accepted: 28.12.2022

DOI: 10.21883/PJTF.2023.05.54669.19227

Bibliographic databases:

•