Theoretical dependence of the target threshold sputtering energy on the incidence angle of primary ions

A. N. Pustovit

Institute of Microelectronics Technology and High-Purity Materials RAS, Chernogolovka, Moscow oblast, Russia

Abstract: To calculate the angular dependence of the threshold sputtering energy on the ratio of the target masses and incident ions, the target surface blocking phenomenon is used. It is established that the angular dependence of the threshold sputtering energy varies inversely proportional to the cosine of the incidence angle of the primary beam on the target (the angle is measured from the normal to the target surface) to power $s/2$ ($s$ is a power exponent in the interaction potential of colliding particles). A comparison with the literature data is carried out.

Keywords: sputtering, threshold energy, shading cone, angle of ions incidence.

Received: 30.03.2022
Revised: 22.10.2022
Accepted: 04.11.2022

DOI: 10.21883/PJTF.2023.01.54055.19206

Bibliographic databases:

•