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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2024 Volume 50, Issue 17, Pages 34–37 (Mi pjtf6758)

Thin films of solid-phase amorphous electrolyte made from nitrogen-doped lithium metaphosphate with an increased ionic conductivity

A. S. Kamenetskikhab, N. V. Gavrilova, P. V. Tretnikova, A. A. Ershova, S. V. Pershinac

a Institute of Electrophysics, Ural Branch, Russian Academy of Sciences, Yekaterinburg, Russia
b Ural Federal University after the first President of Russia B.N. Yeltsin, Yekaterinburg, Russia
c Institute of High-Temperature Electrochemistry, Ural Branch, Russian Academy of Sciences, Yekaterinburg, Russia

Abstract: Thin (1$\mu$m) films of amorphous solid electrolyte were synthesized by anodic evaporation of LiPO$_3$ in Ar/N$_2$ plasma of a low-pressure (0.5 Pa) arc and vapor deposition on metal substrates at the rate of 0.5 $\mu$m/h under the conditions of a widely adjustable (from 0.1 to 0.9) fraction of free Li in vapor. Ionic conductivity of the films was shown to reach 1.7 $\cdot$ 10$^{-5}$ S/cm at room temperature.

Keywords: anodic evaporation, thin films, solid lithium-ion electrolyte.

Received: 18.04.2024
Revised: 13.05.2024
Accepted: 15.05.2024

DOI: 10.61011/PJTF.2024.17.58579.19963



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