Abstract:
Thin (1$\mu$m) films of amorphous solid electrolyte were synthesized by anodic evaporation of LiPO$_3$ in Ar/N$_2$ plasma of a low-pressure (0.5 Pa) arc and vapor deposition on metal substrates at the rate of 0.5 $\mu$m/h under the conditions of a widely adjustable (from 0.1 to 0.9) fraction of free Li in vapor. Ionic conductivity of the films was shown to reach 1.7 $\cdot$ 10$^{-5}$ S/cm at room temperature.