A. I. Okhapkin, S. A. Kraev, P. A. Yunin, S. A. Korolev, D. B. Radishev, N. Kumar, “Thermal annealing of multilayer films of diamond-like carbon with a variable content of <nobr>$sp^3$</nobr>-phase”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2024, Volume 50, Issue 13,Pages <nobr>12

Thermal annealing of multilayer films of diamond-like carbon with a variable content of $sp^3$-phase

A. I. Okhapkin^a, S. A. Kraev^a, P. A. Yunin^a, S. A. Korolev^a, D. B. Radishev^b, N. Kumar^c

^a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
^b Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
^c Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk, Russia

Abstract: The effect of thermal annealing on the phase composition, structural and morphological properties of multilayer films of diamond-like carbon with a variable ratio of $sp^2/sp^3$-phases was investigated. It turned out that rapid annealing in argon leads to a loss of the structural periodicity of films and an increase in the content of graphite clusters, along with a decrease of hydrogen. There was also an improvement in the surface morphology of the annealed samples compared to the original film.

Keywords: diamond-like carbon, multilayer films, plasma-enhanced chemical vapor deposition, thermal annealing.

Received: 09.02.2024
Revised: 12.03.2024
Accepted: 21.03.2024

DOI: 10.61011/PJTF.2024.13.58160.19884