Sputtering thresholds during ion bombarding of different targets

P. Yu. Babenko, V. S. Mikhailov, A. N. Zinov'ev

Ioffe Institute, St. Petersburg, Russia

Abstract: Collision models leading to an explanation of the position of energy thresholds during sputtering of various materials are analyzed. The totality of available experimental and computational data can be described within the framework of a model that takes into account multiple collisions. An empirical curve is proposed to describe the position of the thresholds over the entire possible range of mass ratios of colliding particles. The strong influence of the shape of the surface potential barrier on the position of the sputtering energy threshold is shown.

Keywords: atomic collisions, sputtering, sputtering energy threshold, surface potential barrier.

Received: 22.12.2023
Revised: 20.02.2024
Accepted: 09.03.2024

DOI: 10.61011/PJTF.2024.12.58055.19851

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