The effect of magnetron sputtering conditions during deposition of (BaSrCa)CO$_3$ coatings on thermionic emission of film microcathodes

G. A. Zhabin, O. V. Pelipets, N. A. Sharapov

Research and Production Corporation "Istok" named after Shokin, Fryazino, Moskovskaya obl.

Abstract: The effect of temperature and discharge power of ion-plasma deposition of molecular sputter-deposited oxide microcathodes (MSOC) on their emission activity has been experimentally investigated. The elemental composition of a thin coating of MSOC has been studied using Auge electron spectroscopy (AES) and X-ray fluorescence analysis (XRF). The effect of the atmosphere and residual gases on the operation of microcathodes is shown.

Keywords: molecular sputter-deposited oxide microcathode (MSOC), emission characteristics, durability, work function, electrovacuum device (EVD).

Received: 06.12.2023
Revised: 22.02.2024
Accepted: 09.03.2024

DOI: 10.61011/PJTF.2024.11.57909.19827

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