This article is cited in 2 papers

Nonlinear calibration curves in secondary ion mass spectrometry for quantitative analysis of gesi heterostructures with nanoclusters

M. N. Drozdov^ab, Yu. N. Drozdov^ab, A. V. Novikov^ab, P. A. Yunin^ab, D. V. Yurasov<sup>ab

a</sup> Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
^b Lobachevsky State University of Nizhny Novgorod

Abstract: For the first time in the practice of secondary ion mass spectrometry, we obtained a nonlinear calibration curve for the ratio of the cluster and elementary secondary ions of germanium Ge$_{2}$/Ge without secondary ions of silicon, which enables the quantification of germanium in Ge$_{x}$Si$_{1-x}$ heterostructures in the entire range of 0 $< x\le$ 1. We developed a method for quantitative lateral analysis based on the plotting of a lateral map of $x$. An algorithm to identify and analyze the lateral heterogeneity of $x$ in Ge$_{x}$Si$_{1-x}$ heterostructures with 3D clusters by comparing the results of depth profiling analysis, obtained using linear and nonlinear calibration curves, is developed, and concentration $x$ in the self-assembled nanoislands is determined.

Keywords: Germanium, Technical Physic Letter, Calibration Equation, Linear Calibration Curve, Lateral Heterogeneity.

Received: 25.09.2015

 English version: Technical Physics Letters, 2016, 42:3, 243–247

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