A. I. Èikhvald, I. V. Sadkovskaya, T. A. Eikhval’d, “Mathematical simulation of a membrane capacitive compensation pressure transducer”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 42, Issue 15,Pages <nobr>1

Mathematical simulation of a membrane capacitive compensation pressure transducer

A. I. Èikhvald^a, I. V. Sadkovskaya^b, T. A. Eikhval’d^b

^a Saint Petersburg State University
^b D. I. Mendeleev Institute for Metrology, St. Petersburg, Russia

Abstract: The operation of a membrane capacitive pressure transducer with electrostatic compensation of the membrane deformation has been mathematically simulated. It is shown that the theory describing these instruments is incorrect and the error in measuring pressure by them may be as high as 25–29% of the measured value, which makes them inappropriate for use in pressure metrology.

Received: 01.02.2016