This article is cited in 5 papers

The photoemissive cell of a vacuum ultraviolet radiation detector array

E. A. Il'ichev, A. E. Kuleshov, R. M. Nabiev, G. N. Petrukhin, G. S. Rychkov, E. G. Teverovskaya

National Research University of Electronic Technology, Zelenograd, Moscow, Russia

Abstract: A photoemissive “solar-blind” cell of a vacuum ultraviolet detector array for the 50–225 nm wavelength range is described. The cell is a cavity in the shape of frustum of a pyramid in a silicon wafer, the walls of which are coated by polycrystalline diamond film acting the part of a photosensitive cathode. The design of the cell allows one to manage the work of the detector in the “pass through” mode; i.e., photons fall to one side of the wafer, and photoelectrons release from its opposite side. Estimation of photosensitivity of the cell gives a value of about ten photons.

Received: 06.12.2016

DOI: 10.21883/PJTF.2017.07.44468.16596

 English version: Technical Physics Letters, 2017, 43:4, 345–347

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