This article is cited in 7 papers

A new approach to tof-sims analysis of the phase composition of carbon-containing materials

M. N. Drozdov^a, Yu. N. Drozdov^a, A. I. Okhapkin^a, S. A. Kraev^a, M. A. Lobaev<sup>b

a</sup> Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
^b Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod

Abstract: New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C$_{8}$/C$_{5}$ and CsC$_{8}$/CsC$_{4}$. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.

Received: 11.10.2018

DOI: 10.21883/PJTF.2019.02.47225.17557

 English version: Technical Physics Letters, 2019, 45:1, 48–52

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