Abstract:
In the design of powerful laser-plasma sources of extreme ultraviolet radiation with a gas jet as the target, the problem of degradation of gas nozzles is topical. Degradation is observed due to insufficient distance from the generation zone of the laser-induced spark to the nozzle exit. The comprehensive solution to this problem is proposed by forming the laser-induced spark in the density jumps that are generated upon deceleration of the supersonic gas jet. In such a density jump, the laser-induced spark is obtained and measurements of emission radiation intensity are performed.
Keywords:extreme ultraviolet radiation, degradation of gas nozzles, density jumps, laser-induced spark.