The influence of magnetron sputtering conditions on the structure of Zr–Pd coatings

A. F. Pal', A. N. Ryabinkin, A. O. Serov

Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics

Abstract: Structureless Zr$_{75}$Pd$_{25}$ amorphous metal coatings were obtained using DC magnetron sputtering with an average deposition rate of 1.3 nm/s and a substrate temperature of 40$^\circ$C, as well as the crystalline coatings at a higher temperature. The equilibrium phase composition is observed at a temperature 350$^\circ$C. At intermediate temperature mainly the PdZr phase is formed against the equilibrium PdZr$_2$ phase. The roughness of the obtained amorphous coatings is of 0.2–0.5 nm, which is an order of magnitude lower than that of crystalline coatings of the same composition.

Keywords: metallic glasses, amorphous metal films, palladium, zirconium, magnetron sputtering.

Received: 27.12.2019
Revised: 15.04.2020
Accepted: 21.04.2020

DOI: 10.21883/PJTF.2020.14.49669.18167

 English version: Technical Physics Letters, 2020, 46:7, 725–728

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