V. O. Kuzmenko, A. V. Myakon'kikh, “Low-pressure inductively coupled CF<nobr>$_{3}$</nobr>Br plasma studied by the Langmuir probe and optical emission spectroscopy techniques”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 2,Pages <nobr>52

This article is cited in 1 paper

Low-pressure inductively coupled CF$_{3}$Br plasma studied by the Langmuir probe and optical emission spectroscopy techniques

V. O. Kuzmenko, A. V. Myakon'kikh

Insitute of Physics and Technology, Institution of Russian Academy of Sciences, Moscow

Abstract: The parameters of the inductively coupled low pressure CF$_{3}$Br plasma were measured by the Langmuir probe and actinometry. The electron temperature and concentrations of electrons and positive ions, as well as fluorine and bromine radicals, have been determined. An explanation is proposed for the previously observed significant degradation of low-k dielectrics during etching in the studied plasma.

Keywords: low-temperature nonequilibrium plasma, optical emission spectroscopy, Langmuir probe, bromine-containing plasma, inductively coupled plasma.

Received: 12.10.2020
Revised: 14.10.2020
Accepted: 14.10.2020

DOI: 10.21883/PJTF.2021.02.50548.18578