This article is cited in 1 paper

Developing low-profile deflectometer for combined scanning probe and optical microscopy systems

A. V. Mezin^a, A. E. Efimov^b, D. O. Solovyeva^a, I. S. Vaskan^ac, V. A. Oleĭnikov^a, K. E. Mochalov<sup>a

a</sup> M. M. Shemyakin and Yu. A. Ovchinnikov Institute of Bioorganic Chemistry of the Russian Academy of Sciences, Moscow
^b Research Institute of Transplantology and Artificial Organs
^c Moscow Institute of Physics and Technology (National Research University), Dolgoprudny, Moscow Region

Abstract: A system of a low-profile SPM-deflectometer (SPM - scanning probe microscopy) which makes it possible to increase the aperture of the supplied objectives to the currently record value $NA$ = 0.75 has been developed, manufactured and tested. The introduction of such a system will significantly improve the performance of optical techniques for combined SPM / optical microspectroscopy systems.

Keywords: scanning probe microscopy, optical microspectroscopy, correlation microscopy, SPM-deflectometer.

Received: 09.10.2020
Revised: 03.12.2020
Accepted: 03.12.2020

DOI: 10.21883/PJTF.2021.06.50753.18577

 English version: Technical Physics Letters, 2021, 47:4, 287–289

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