Nanoisland shape variation during selective epitaxy

V. G. Dubrovskii

Saint Petersburg State University

Abstract: A model is developed for the changes in the nanoisland shape in selective area epitaxy. The model is based on the minimization of the surface energy at a given volume. The geometry considered is an island restricted by the two (101) and (112) side facets and (001) facet at the top, with the facet size changing with the island volume. The calculations are presented for the facet lengths, the corresponding aspect ratios and fractions of the surface areas of the competing facets.

Keywords: selective epitaxy, island shape, surface energy.

Received: 06.04.2021
Revised: 23.04.2021
Accepted: 23.04.2021

DOI: 10.21883/PJTF.2021.14.51187.18811

 English version: Technical Physics Letters, 2021, 47:10, 701–704

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