This article is cited in 5 papers

Laser etching of germanium

V. Yu. Zheleznov^a, T. V. Malinskiy^a, S. I. Mikolutskiy^a, V. E. Rogalin^a, S. A. Filin^a, Yu. V. Khomich^a, V. A. Yamshchikov^a, I. A. Kaplunov^b, A. I. Ivanova<sup>b

a</sup> Institute of Problems of Electrophysics of the Russian Academy of Sciences, St. Petersburg
^b Tver State University

Abstract: Investigation of a polished surface of germanium single crystals scanned with a focused beam of pulse-frequency modulated UV radiation of Nd:YAG laser showed evidence of laser-induced surface etching at subthreshold energy densities ($E$ $\sim$ 0.5 – 1.15 J/cm$^2$) in the absence of noticeable traces of crater formation. It is suggested that the ablation centers nucleate on dislocations escaping at the surface of germanium crystals.

Keywords: UV laser, nanosecond pulse, optical damage threshold, ablation, laser etching, germanium single crystal.

Received: 03.02.2021
Revised: 11.04.2021
Accepted: 12.04.2021

DOI: 10.21883/PJTF.2021.14.51181.18724

 English version: Technical Physics Letters, 2021, 47:10, 734–736

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