V. L. Kantsyrev, N. V. Morozov, B. A. Olshvanger, P. B. Sergeev, M. A. Tyunina, “ARSENIC IMPLANTATION TO SILICON THROUGH POWERFUL KRF LASER-EMISSION”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1991, Volume 17, Issue 2,Pages <nobr>56

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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1991 Volume 17, Issue 2, Pages 56–61 (Mi pjtf3638)

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ARSENIC IMPLANTATION TO SILICON THROUGH POWERFUL KRF LASER-EMISSION

V. L. Kantsyrev, N. V. Morozov, B. A. Olshvanger, P. B. Sergeev, M. A. Tyunina

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