M. P. Vatnik, Yu. V. Trushin, “EFFECT OF DIFFUSION IN THERMAL PEAK ON THE RESOLUTION OF METHODS OF ANALYSIS OF DEEP ADMIXTURE DISTRIBUTION USING ION ETCHING”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 1990, Volume 16, Issue 7,Pages <nobr>43

JOURNALS // Pisma v Zhurnal Tekhnicheskoi Fiziki // Archive

Pisma v Zhurnal Tekhnicheskoi Fiziki, 1990 Volume 16, Issue 7, Pages 43–47 (Mi pjtf3191)

EFFECT OF DIFFUSION IN THERMAL PEAK ON THE RESOLUTION OF METHODS OF ANALYSIS OF DEEP ADMIXTURE DISTRIBUTION USING ION ETCHING

M. P. Vatnik, Yu. V. Trushin

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