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// Pisma v Zhurnal Tekhnicheskoi Fiziki
// Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki,
1989
Volume 15,
Issue 1,
Pages
74–78
(Mi pjtf2477)
CONTROL OF UHF REGIMES OF VACUUM-PLASMA TREATMENT OF MICROELECTRONIC STRUCTURES
Yu. V. Gulyaev
, R. K. Yafarov
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Steklov Math. Inst. of RAS
, 2026
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