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// Pisma v Zhurnal Tekhnicheskoi Fiziki
// Archive
Pisma v Zhurnal Tekhnicheskoi Fiziki,
1988
Volume 14,
Issue 24,
Pages
2211–2214
(Mi pjtf2435)
MECHANISM OF POWER ABSORPTION UNDER THE UHF VACUUM-PLASMA TREATMENT OF MICROELECTRONIC STRUCTURES
Yu. V. Gulyaev
, R. K. Yafarov
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Steklov Math. Inst. of RAS
, 2026
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