CHANGE OF THE CONCENTRATION OF ADHESION CENTERS AND LIFETIME OF NONEQUILIBRIUM CARRIERS IN SILICON DURING FORMATION OF INTERNAL GETGERS - STAGE NONDESTRUCTION CONTROL OF GETTERING

D. N. Gulidov, V. I. Dumbrov, V. A. Milyaev, V. A. Nikitin, A. V. Shirkov, B. L. Eidelman

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